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Attenuation characteristics of InP/InGaAsP deep‐ridge waveguide turning mirror
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- Issue Date
- 2003-06
- Citation
- Microwave and Optical Technology Letters, v.37, no.6, pp.428-431
- ISSN
- 0895-2477
- Publisher
- Wiley
- Language
- English
- Type
- Journal Article
- Abstract
- Attenuation of a deep-ridge waveguide turning mirror is analyzed using a simple overlap integral calculation. According to this analysis, loss of the fabricated mirror was improved by 1.1 dB and uniformity was also improved. Our analysis shows that more reduction of attenuation can be made by using the steep mirror facet through an optimization of the dry etch condition. © 2003 Wiley Periodicals, Inc.
- KSP Keywords
- Attenuation characteristics, Dry etch, Overlap integral, deep-ridge waveguide, integral calculation