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Conference Paper
Monolithic integration of the BRS active waveguide with the undoped upper cladded passive waveguide for the 4x4 SOA gate switch matrix application
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- Issue Date
- 2003-06
- Citation
- Integrated Photonics Research (IPR) 2003, pp.1-3
- Language
- English
- Type
- Conference Paper
- Abstract
- To reduce the high propagation loss in the passive region due to the p-doped upper clad, a new fabrication process is proposed to integrate undoped upper cladded passive waveguides with a buried ridge stripe semiconductor optical amplifiers. The Fabry-Perot lasers fabricated with this process show the good uniformity. A 4×4 semiconductor optical amplifier gate switch matrix was successfully fabricated using this process technology, due to the low propagation loss of the passive waveguides and the good uniformity of active waveguides.
- KSP Keywords
- Active waveguide, Fabry-Perot laser, Monolithic Integration, P-doped, Propagation loss, Semiconductor optical amplifiers(SOAs), Switch matrix, fabrication process, process technology