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Conference Paper Monolithic integration of the BRS active waveguide with the undoped upper cladded passive waveguide for the 4x4 SOA gate switch matrix application
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Authors
J.H. Song, H.S. Kim, E.D. Sim, J.W. Park, J.H. Kim, K.R. Oh, Y. Baek
Issue Date
2003-06
Citation
Integrated Photonics Research (IPR) 2003, pp.1-3
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1364/IPR.2003.IWB3
Abstract
To reduce the high propagation loss in the passive region due to the p-doped upper clad, a new fabrication process is proposed to integrate undoped upper cladded passive waveguides with a buried ridge stripe semiconductor optical amplifiers. The Fabry-Perot lasers fabricated with this process show the good uniformity. A 4×4 semiconductor optical amplifier gate switch matrix was successfully fabricated using this process technology, due to the low propagation loss of the passive waveguides and the good uniformity of active waveguides.
KSP Keywords
Active waveguide, Fabry-Perot laser, Monolithic Integration, P-doped, Propagation loss, Semiconductor optical amplifiers(SOAs), Switch matrix, fabrication process, process technology