ETRI-Knowledge Sharing Plaform

ENGLISH

성과물

논문 검색
구분 SCI
연도 ~ 키워드

상세정보

학술대회 Packaging technology for wavelength tunable filter based on optical MEMS
Cited 0 time in scopus Download 0 time Share share facebook twitter linkedin kakaostory
저자
엄용성, 이종현, 최병석, 김종덕, 윤호경, 최광승, 문종태, 이명래, 최창억, 전치훈
발행일
200308
출처
IEEE LEOS International Conference on Optical MEMS 2003, pp.67-68
DOI
https://dx.doi.org/10.1109/OMEMS.2003.1233470
협약과제
02MB6500, 광 회선분배용 대용량 MOEMS 소자 기술, 전치훈
초록
One of the key components for the WDM optical communication is a wavelength tunable filter. The packaging technology of the tunable filter with Fabry-Perot cavity based on optical MEMS is investigated for the low power consumption and mass production. The flip chip process with Au-20(wt.%)Sn solder was conducted to integrate two DBR mirrors in parallel with a constant distance for the simple design of packaging structure. TEC fiber was used to achieve a wide range of the optical alignment tolerance for the high coupling efficiency.
KSP 제안 키워드
Constant distance, DBR mirrors, Fabry-Perot cavity, High coupling efficiency, Key Components, Optical alignment, Packaging structure, Packaging technology, Simple design, Tunable filters(TFs), Wavelength tunable