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47 nm tuning of thermally actuated Fabry-Perot tunable filter with very low power consumption
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- Authors
- Chang Kyu-Kim, Myung-Lae Lee, Chi-Hoon Jun, Youn Tae Kim
- Issue Date
- 2003-08
- Citation
- IEEE LEOS International Conference on Optical MEMS 2003, pp.38-39
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- Abstract
- A thermally actuated GaAs-based wavelength tunable filter with 7.64-μm-thick suspended structure is presented. Wide tuning range of 74 nm is achieved with the low driving voltage 4.6 V and the power consumption of 4.97 mW.
- KSP Keywords
- Fabry-perot, Suspended structure, Tunable filters(TFs), Wavelength tunable, Wide Tuning Range, low driving voltage, low power consumption