상세정보
학술대회
47 nm tuning of thermally actuated Fabry-Perot tunable filter with very low power consumption
- 발행일
- 200308
- 출처
- IEEE LEOS International Conference on Optical MEMS 2003, pp.38-39
- 협약과제
- 02MB6500, 광 회선분배용 대용량 MOEMS 소자 기술, 전치훈
- 초록
- A thermally actuated GaAs-based wavelength tunable filter with 7.64-μm-thick suspended structure is presented. Wide tuning range of 74 nm is achieved with the low driving voltage 4.6 V and the power consumption of 4.97 mW.
- KSP 제안 키워드
- Fabry-perot, Suspended structure, Tunable filters(TFs), Wavelength tunable, Wide Tuning Range, low driving voltage, low power consumption