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Conference Paper
A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors
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- Authors
- Dooyoung Hah, Chang-Auck Choi, Chi-Hoon Jun, Youn Tae Kim
- Issue Date
- 2003-08
- Citation
- IEEE LEOS International Conference on Optical MEMS 2003, pp.151-152
- Language
- English
- Type
- Conference Paper
- Abstract
- A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of 짹1.4째 at 66 VDC was achieved for a 1-mm-diameter micromirror.