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Focusing grating coupler for blue laser light
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- Authors
- Yeungjoon Sohn, Yongwoo Park, Dongwoo Suh, H. Ryu, Mun Cheol Paek
- Issue Date
- 2004-01
- Citation
- IEEE Photonics Technology Letters, v.16, no.1, pp.162-164
- ISSN
- 1041-1135
- Publisher
- IEEE
- Language
- English
- Type
- Journal Article
- Project Code
- 03MB2400, 초소형 광 헤드 및 테라비트급 하이브리드 헤드 핵심기술 개발, Chang Soon Ho
- Abstract
- A focusing grating coupler (FGC) for use with a blue laser of 400-nm wavelength as a light source was fabricated for the first time. The FGC was designed to have a numerical aperture of 0.48 and a minimum period of 0.2 μm when the focal length and the grating area were 900 μm and 1 × 1 mm2, respectively. Grating pattern of minimum line of 0.1 μm was fabricated on a waveguide based on the boron phosphor-silicate glass material by electron-beam lithography process using the vector scan method. The spot size at the full width (1/e2) was measured as 0.92 and 0.85 μm in x and y directions and was nearly the same as the diffraction limit.
- KSP Keywords
- Blue laser, Diffraction limit, Focal length, Full width, Glass materials, Laser light, Light sources, Silicate glasses, Spot size, electron beam lithography, grating coupler