상세정보
학술지
Focusing grating coupler for blue laser light
- 발행일
- 200401
- 출처
- IEEE Photonics Technology Letters, v.16 no.1, pp.162-164
- ISSN
- 1041-1135
- 출판사
- IEEE
- 협약과제
- 03MB2400, 초소형 광 헤드 및 테라비트급 하이브리드 헤드 핵심기술 개발, 장순호
- 초록
- A focusing grating coupler (FGC) for use with a blue laser of 400-nm wavelength as a light source was fabricated for the first time. The FGC was designed to have a numerical aperture of 0.48 and a minimum period of 0.2 μm when the focal length and the grating area were 900 μm and 1 × 1 mm2, respectively. Grating pattern of minimum line of 0.1 μm was fabricated on a waveguide based on the boron phosphor-silicate glass material by electron-beam lithography process using the vector scan method. The spot size at the full width (1/e2) was measured as 0.92 and 0.85 μm in x and y directions and was nearly the same as the diffraction limit.
- KSP 제안 키워드
- Blue laser, Diffraction limit, Focal length, Full width, Glass materials, Laser light, Light sources, Silicate glasses, Spot size, electron beam lithography, grating coupler