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Two-dimensional polymeric optical waveguides for high-density parallel optical interconnection
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- Authors
- Choon-Gi Choi, Sang-Pil Han, Myung-Yung Jeong
- Issue Date
- 2004-05
- Citation
- Optics Communications, v.235, no.1-3, pp.69-73
- ISSN
- 0030-4018
- Publisher
- Elsevier
- Language
- English
- Type
- Journal Article
- Abstract
- This paper presents two-dimensional polymeric optical waveguides for high-density parallel optical interconnections and a double-sided hot embossing process. Using this process we have simultaneously fabricated two-dimensional 24 channel optical waveguides. To improve the anti-sticking effect of PMMA to the silicon mold master during the de-embossing process, the mold master was treated with a self-assembled silane monolayer using a vapor deposition process. The minimum propagation loss of the fabricated 2 × 12 channel waveguides was estimated to be 0.198 dB/cm at 850 nm wavelength. © 2004 Elsevier B.V. All rights reserved.
- KSP Keywords
- 850 nm, Anti-sticking, Double-sided, High-density, Optical interconnection, Optical waveguides, Propagation loss, Silane monolayer, Sticking effect, channel waveguide, deposition process