상세정보
학술지
Two-dimensional polymeric optical waveguides for high-density parallel optical interconnection
- 발행일
- 200405
- 출처
- Optics Communications, v.235 no.1-3, pp.69-73
- ISSN
- 0030-4018
- 출판사
- Elsevier
- 협약과제
- 02SB1500, 다채널 광커넥터 기반의 고속 광접속모듈 및 패키징 기술개발, 정명영
- 초록
- This paper presents two-dimensional polymeric optical waveguides for high-density parallel optical interconnections and a double-sided hot embossing process. Using this process we have simultaneously fabricated two-dimensional 24 channel optical waveguides. To improve the anti-sticking effect of PMMA to the silicon mold master during the de-embossing process, the mold master was treated with a self-assembled silane monolayer using a vapor deposition process. The minimum propagation loss of the fabricated 2 × 12 channel waveguides was estimated to be 0.198 dB/cm at 850 nm wavelength. © 2004 Elsevier B.V. All rights reserved.