상세정보
학술지
Frequency response separation scheme for non-contact type atomic force microscope
- 저자
- 이성규, Woo-Sub Youm, 송기봉, 김은경, 김준호, Kyi-Hwan Park, 박강호
- 발행일
- 200410
- 출처
- Sensors and Actuators A : Physical, v.116 no.1, pp.45-50
- ISSN
- 0924-4247
- 출판사
- Elsevier
- 협약과제
- 04SB1400, 근접장 광 정보 저장 헤드장치의 개발(나노 광정보 저장기술 개발), 박강호
- 초록
- We propose the simple structure of non-contact type atomic force microscope (AFM) with frequency response separation (FRS) scheme. In conventional non-contact AFM, two actuators have been used: one actuator is used for controlling the gap between the cantilever tip and the sample surface. Another is for vibrating the tip at its fundamental mode to measure the tip-sample distance. However, with the FRS scheme, only one actuator is enough for non-contact AFM measurement. Based on the FRS scheme, the multiplex signals of the gap control command signal and the gap measuring vibrating signal are applied to the only one actuator. So, this 'single' actuator plays two roles: tip-sample gap control and cantilever vibrating. In this paper, block PZT and bimorph PZT are used as 'single' actuators, respectively. And, a piezo-resistive cantilever is used for an easy detection of cantilever deflection with simple structure. Frequency responses of each actuator and the cantilever were experimented to confirm the effect of the FRS scheme. And, a 10μm standard grid sample was imaged with the proposed structure to verify feasibility. © 2004 Elsevier B.V. All rights reserved.
- KSP 제안 키워드
- AFM measurements, Atomic force microscope(AFM), Cantilever deflection, Easy detection, Frequency response(FreRes), Gap control, Non-contact AFM, Non-contact type, Piezo-resistive cantilever, Vibrating signal, fundamental mode