상세정보
학술지
Electrothermally Actuated Fabry?Perot Tunable Filter With a High Tuning Efficiency
- 발행일
- 200408
- 출처
- IEEE Photonics Technology Letters, v.16 no.8, pp.1894-1896
- ISSN
- 1041-1135
- 출판사
- IEEE
- 협약과제
- 04MB5100, 초고주파 미세전자기계시스템 기술 개발, 강성원
- 초록
- We report on a electrothermally actuated Fabry-P챕rot wavelength tunable filter with a high tuning efficiency by using surface micromachining. To prevent a current flowing through the mirror, a Wheatstone bridge structure is introduced. Because the full wafer is monolithically grown and the electrodes are formed in a single step, the fabrication processes is simple and reproducible. As the current flows through the two parallel thermal actuators, the top mirror moves away from the bottom mirror so that a sticking problem does not occur. The maximum voltage for the 69-nm wavelength tuning by using a 5.2-μm-thick filter structure is only 1.7 V and the high tuning efficiency of ~75 nm/mW is achieved. © 2004 IEEE.
- KSP 제안 키워드
- 5 nm, Bridge structure, Full wafer, Single step, Thermal actuators, Tunable filters(TFs), Wavelength tunable, Wheatstone bridge, fabrication process, maximum voltage, surface micromachining