상세정보
학술지
Surface micromachined thermally driven micropump
- 저자
- 장원익, 최창억, 전치훈, 김윤태, Masayoshi Esashi
- 발행일
- 200409
- 출처
- Sensors and Actuators A : Physical, v.115 no.1, pp.151-158
- ISSN
- 0924-4247
- 출판사
- Elsevier
- 협약과제
- 01MB4700, 광 회선분배용 대용량 MOEMS 소자 기술, 전치훈
- 초록
- This paper presents the design, fabrication, and testing of a thermally driven micropump fabricated by surface micromachining. The micropump consists of a membrane of a corrugated diaphragm, a sealed cavity filled with air and buried with n+ polysilicon microheater and a microchannel with a pair of nozzle and diffuser valves. The polysilicon membrane was used as a structural layer and low-temperature oxide (LTO) and plasma enhanced chemical vapor deposition (PECVD) oxide as a sacrificial layer. Using gas-phase etching (GPE) process with anhydrous hydrogen fluoride (HF) gas and isopropyl alcohol (IPA) vapor, we successfully fabricated the thermally driven micropmump with no virtually process-induced stiction. The flow rate of the micropump is measured at the applied voltage of 25V with the duty cycle of 50%. The maximum flow rate of the micropump with the corrugated diaphragm is about 3.1μl/min at 5Hz. © 2004 Elsevier B.V. All rights reserved.
- KSP 제안 키워드
- Anhydrous hydrogen fluoride(AHF), Corrugated diaphragm, Duty cycle(DC), Gas-phase etching, Hydrogen fluoride(HF), Low temperature(LT), Maximum flow rate, Sacrificial layer, Surface micromachined, applied voltage, isopropyl alcohol