Polymer waveguides have attracted a great deal of attention for their potential applications as optical components in optical communications, optical interconnections and optical sensors because they are easy to manufacture at a low temperature, and they have a low processing cost. Hot embossing is powerful and effective tools to produce a large volume of waveguides and structure high-precision micro/nano patterns of thin polymer films using a stamp for optical applications. In this work, fabrication techniques of hot embossed polymeric optical waveguides for parallel optical interconnection module, multi-channel variable optical attenuator and optical printed circuit boards are demonstrated. The single- and multi-mode waveguides are produced by core filling and UV curing processes. New approaches to fabricating single-mode polymeric waveguides with the high thermal stability in thermosetting polymers and two-dimensional multi-mode polymeric waveguides for high-density parallel optical interconnections as well as a simultaneous fabrication of single-mode polymeric waveguides with micro pedestals for passive fiber alignment are also reported.
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