상세정보
학술대회
Design and performance of a self-sensing, self-actuating piezoelectric monomorph with interdigitated electrodes
- 발행일
- 200410
- 출처
- Optomechatronic Sensors, Actuators, and Control (SPIE 5602), pp.210-217
- 협약과제
- 04SB1400, 근접장 광 정보 저장 헤드장치의 개발(나노 광정보 저장기술 개발), 박강호
- 초록
- A smart cantilever structure using single-crystal relaxor ferroelectric material is presented. The smart cantilever possesses both sensing and actuation capabilities, embedded in a monomorph and resulting in a smart structure. Single crystal relaxor ferroelectric materials (1-x)Pb(Zn 1/3Nb 2/3)O 3-xPbTiO 3 (PZN-PT) and (1-x)Pb(Mg 1/3Nb 2/3)O 3-xPbTiO 3 (PMN-PT) are ideal for actuator and sensor applications since they exhibit very high piezoelectric coefficients. We separately pattern interdigitated electrodes on the top and bottom surfaces of a single crystal cantilever beam. The interdigitated electrode design results in an electric field- gradient that after poling not only induces flapping actuation but also, simultaneously, allows us to detect internally or externally induced stresses. As a monolithic actuator integrated with a sensor, it has potential applications in various Micro-Electro-Mechanical Systems (MEMS), Scanning Probe Microscopy (SPM) and Near-field Scanning Optical Microscopy (NSOM). We fabricate monomorph prototypes and characterize their performance in terms of actuation displacement and sensing capabilities, respectively. Finally, an active vibration control experiment was successfully conducted by using the smart cantilever structure.
- KSP 제안 키워드
- Cantilever structure, Control experiment, Interdigitated electrode design, Micro-electro-mechanical system(MEMS), O 3, PMN-PT, PZN-PT, Potential applications, Scanning Probe Microscopy, Self-actuating, Single crystal