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Conference Paper
Recessed source-drain (S/D) SOI MOSFETs with low S/D extension (SDE) external resistance
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- Authors
- C. G. Ahn, W. J. Cho, K. J. Im, J. H. Yang, I. B. Baek, S. K. Baek, S. J. Lee
- Issue Date
- 2004-10
- Citation
- International SOI Conference 2004, pp.207-208
- Language
- English
- Type
- Conference Paper
- Project Code
- 04MB1400, Development of Source Technologies for Future Silicon Devices, Lee Seong Jae
- KSP Keywords
- External resistance, SOI MOSFET