상세정보
학술지
A Two-Step Etching Technique for Silica Terraces in the PLC Hybrid Integration
- 발행일
- 200411
- 출처
- Photonics Technology Letters, v.16 no.11, pp.2436-2438
- 협약과제
- 04MB2600, 광엑세스용 광집적 모듈, 오광룡
- 초록
- Two-step etching, after the full processes of a silica waveguide, was performed to fabricate a silica-terraced planar lightwave circuit platform for the hybrid integration of optoelectronic devices. Spot-size converted distributed feedback laser diodes (SSC DFB LDs) were flip-chip bonded on silica terraces with the height accuracy of less than 1 μm, and the resultant coupling loss between the SSC DFB LD and the silica waveguide was about 3.78 dB. The fight-current curve of the LD filp-chip bonded on the platform showed the almost linear increase of the output power without any saturation. © 2004 IEEE.
- KSP 제안 키워드
- Coupling loss, Distributed feedback laser diode, Distributed feedback lasers(DFBs), Etching technique, Height accuracy, Hybrid Integration, Laser diode(LD), Linear increase, Output power, Planar lightwave circuit(PLC), Silica waveguide