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학술지 Oxide-Thin-Film-Transistor-Based Ferroelectric Memory Array
Cited 27 time in scopus Download 2 time Share share facebook twitter linkedin kakaostory
저자
김병훈, 변춘원, 윤성민, 양신혁, 정순원, 유민기, 박상희, 황치선, 조경익, 권오상, 박은숙, 오힘찬, 김경환, 박기찬
발행일
201103
출처
IEEE Electron Device Letters, v.32 no.3, pp.324-326
ISSN
0741-3106
출판사
IEEE
DOI
https://dx.doi.org/10.1109/LED.2010.2096197
협약과제
11MB2300, 고품위 Plastic AMOLED 원천기술 개발, 유병곤
초록
A new ferroelectric memory array on a glass substrate has been developed using InGaZnO (IGZO) thin-film transistors (TFTs). Each memory cell is composed of two normal IGZO TFTs and a ferroelectric TFT (FeTFT). Poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)] is employed as the gate dielectric layer of the FeTFT. All the fabrication processes were performed below 200 °C . The fabricated memory successfully demonstrated disturb-free write/readout operation. The current ratio between the 1 and 0 states is about 10-4. © 2006 IEEE.
KSP 제안 키워드
Current ratio, Disturb-free, Glass substrate, IGZO TFTs, Memory Array, Thin-Film Transistor(TFT), VDF-TrFE, dielectric layer, fabrication process, ferroelectric memory, gate dielectric