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Conference Paper Thermal Conductivity of Thin Film Al2O3 Grown by Atomic Layer Deposition
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Authors
Junsoo Kim, Wonchul Choi, Soojung Kim, Taekwang Kim, Hyundal Jung, Dongsuk Jun, Taehyoung Zyung, Eun-su Nam, Seungen Moon, Seung-Min Lee
Issue Date
2015-05
Citation
European Materials Research Society (E-MRS) Meeting 2015 (Spring), pp.1-1
Publisher
E-MRS
Language
English
Type
Conference Paper
KSP Keywords
Atomic Layer Deposition, thermal conductivity, thin film(TF)