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Conference Paper
Thermal Conductivity of Thin Film Al2O3 Grown by Atomic Layer Deposition
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- Authors
- Junsoo Kim, Wonchul Choi, Soojung Kim, Taekwang Kim, Hyundal Jung, Dongsuk Jun, Taehyoung Zyung, Eun-su Nam, Seungen Moon, Seung-Min Lee
- Issue Date
- 2015-05
- Citation
- European Materials Research Society (E-MRS) Meeting 2015 (Spring), pp.1-1
- Publisher
- E-MRS
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Atomic Layer Deposition, thermal conductivity, thin film(TF)