상세정보
학술지
Fabrication and characterization of a bidirectional valveless peristaltic micropump and its application to a flow-type immunoanalysis
- 저자
- 이대식, Hyun C. Yoon, 고종수
- 발행일
- 200409
- 출처
- Sensors and Actuators B : Chemical, v.103 no.1-2, pp.409-415
- ISSN
- 0925-4005
- 출판사
- Elsevier
- 협약과제
- 04MB2500, e-Health 구현을 위한 생체신호 감지, 처리, 통신 통합소자, 최창억
- 초록
- A planar bidirectional valveless peristaltic micropump for controlling biological sample fluids was designed with a very simple structure and fabricated employing MEMS technologies including deep reactive ion etching (DRIE) process in silicon, chemomechanical polishing (CMP), and silicon-glass anodic bonding. The proposed micropump was able to control the flow bidirectionally at the rate of ~12μl/min (20nl/stroke) for water and ~60μl/min (100nl/stroke) for air with an operation frequency of 10Hz at a voltage of 120Vpp. Actuation modeling of the PZT-glass actuator was performed using the CoventorWare, and the simulation results agreed well with the experimental measurements. In addition, the fabricated micropump was used in the setup for flow-type analysis and was found adequate in the electrochemical immunosensing by biocatalyzed precipitation. © 2004 Elsevier B.V. All rights reserved.
- KSP 제안 키워드
- Anodic bonding, Biocatalyzed precipitation, Biological sample, Deep reactive ion etching, Electrochemical immunosensing, Experimental measurements, Peristaltic micropump, Reactive ion etching(RIE), Type Analysis, chemomechanical polishing, fabrication and characterization