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Journal Article Fabrication and characterization of a bidirectional valveless peristaltic micropump and its application to a flow-type immunoanalysis
Cited 28 time in scopus Share share facebook twitter linkedin kakaostory
Authors
Dae-Sik Lee, Hyun C. Yoon, Jong Soo Ko
Issue Date
2004-09
Citation
Sensors and Actuators B : Chemical, v.103, no.1-2, pp.409-415
ISSN
0925-4005
Publisher
Elsevier
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1016/j.snb.2004.04.081
Abstract
A planar bidirectional valveless peristaltic micropump for controlling biological sample fluids was designed with a very simple structure and fabricated employing MEMS technologies including deep reactive ion etching (DRIE) process in silicon, chemomechanical polishing (CMP), and silicon-glass anodic bonding. The proposed micropump was able to control the flow bidirectionally at the rate of ~12μl/min (20nl/stroke) for water and ~60μl/min (100nl/stroke) for air with an operation frequency of 10Hz at a voltage of 120Vpp. Actuation modeling of the PZT-glass actuator was performed using the CoventorWare, and the simulation results agreed well with the experimental measurements. In addition, the fabricated micropump was used in the setup for flow-type analysis and was found adequate in the electrochemical immunosensing by biocatalyzed precipitation. © 2004 Elsevier B.V. All rights reserved.