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Journal Article
Fabrication and characterization of a bidirectional valveless peristaltic micropump and its application to a flow-type immunoanalysis
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- Authors
- Dae-Sik Lee, Hyun C. Yoon, Jong Soo Ko
- Issue Date
- 2004-09
- Citation
- Sensors and Actuators B : Chemical, v.103, no.1-2, pp.409-415
- ISSN
- 0925-4005
- Publisher
- Elsevier
- Language
- English
- Type
- Journal Article
- Abstract
- A planar bidirectional valveless peristaltic micropump for controlling biological sample fluids was designed with a very simple structure and fabricated employing MEMS technologies including deep reactive ion etching (DRIE) process in silicon, chemomechanical polishing (CMP), and silicon-glass anodic bonding. The proposed micropump was able to control the flow bidirectionally at the rate of ~12μl/min (20nl/stroke) for water and ~60μl/min (100nl/stroke) for air with an operation frequency of 10Hz at a voltage of 120Vpp. Actuation modeling of the PZT-glass actuator was performed using the CoventorWare, and the simulation results agreed well with the experimental measurements. In addition, the fabricated micropump was used in the setup for flow-type analysis and was found adequate in the electrochemical immunosensing by biocatalyzed precipitation. © 2004 Elsevier B.V. All rights reserved.
- KSP Keywords
- Anodic bonding, Biocatalyzed precipitation, Biological sample, Deep reactive ion etching, Electrochemical immunosensing, Experimental measurements, Peristaltic micropump, Reactive ion etching(RIE), Type Analysis, chemomechanical polishing, fabrication and characterization