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Journal Article Floating-patch MEMS Antennas on HRS Substrate for Millimetre-wave Applications
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Authors
Y.H. Cho, M.-L. Ha, W. Choi, C. Pyo, Y.-S. Kwon
Issue Date
2005-01
Citation
Electronics Letters, v.41, no.1, pp.5-6
ISSN
0013-5194
Publisher
IET
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1049/el:20057307
Abstract
Novel floating-patch micro-electro-mechanical system (MEMS) antennas are proposed for millimetre-wave applications. The floating-patch MEMS antennas are fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented.
KSP Keywords
Micro-electro-mechanical system(MEMS), Radiation Pattern, Reflection Coefficient, high resistivity silicon, micromachining technology, millimetre-wave, surface micromachining