BROWSE
Detail
Journal Article
Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors
- Issue Date
- 2012-12
- Citation
- ETRI Journal, v.34, no.6, pp.970-973
- ISSN
- 1225-6463
- Publisher
- 한국전자통신연구원 (ETRI)
- Language
- English
- Type
- Journal Article
- Abstract
- In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are 0.1 cm2/Vs and 106 respectively. The developed OTFT can be applied to a flexible display on a plastic substrate. © 2012 ETRI.
- KSP Keywords
- Deposition method, Growth characteristics, Large area deposition, ON/OFF current ratio, Organic thin-film transistors, Organic vapor, Plastic substrate, Pressure control, Thin-Film Transistor(TFT), design and build, flexible display