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Conference Paper MEMS Piezoresistive Pressure Sensor with Substrate Inner Cavity
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Authors
Chang Han Je, Jong-Chang Woo, Chang Auck Choi, Sung Q Lee, Woo Seok Yang
Issue Date
2015-09
Citation
COMS Conference 2015, pp.1-2
Language
English
Type
Conference Paper
KSP Keywords
MEMS piezoresistive pressure sensor