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Fabrication Method for Passive Alignment in Polymer PLCs With U-Grooves
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- Authors
- Sun Tak Park, Jong Moo Lee, Sang Choon Ko
- Issue Date
- 2005-07
- Citation
- IEEE Photonics Technology Letters, v.17, no.7, pp.1444-1446
- ISSN
- 1041-1135
- Publisher
- IEEE
- Language
- English
- Type
- Journal Article
- Abstract
- A method is developed to enhance fabrication tolerance for the passive alignment of polymer waveguides to optical fibers in polymer-based planar lightwave circuit (PLC) devices. For the passive alignment, the waveguides and U-grooves, into which the optical fibers are set, are fabricated on a substrate. In order to eliminate lateral misalignment between the centers of the waveguides and U-grooves due to the steps of photolithography, an optical axis alignment is achieved in one photomask. Reduced-cladding single-mode fibers with an 80-μm diameter are used to reduce vertical misalignment. PLCs based on polymers were implemented on a 4-in Si wafer using the method, and excessive losses of less than 0.4 dB were obtained. © 2005 IEEE.
- KSP Keywords
- Fabrication method, Fabrication tolerance, Lateral misalignment, Optical axis, Optical fiber, Planar lightwave circuit(PLC), Si wafer, Single-mode fiber(SMF), axis alignment, passive alignment, polymer waveguide