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Focus Tunable MEMS Deformable Convex Mirror Based on Electromagnetic Actuation
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- Authors
- Md. Mahabub HOSSAIN, Wu BIN, Won Ick JANG, Seong Ho KONG
- Issue Date
- 2015-10
- Citation
- International Conference on Applied Mechanics and Mechatronics Engineering (AMME) 2015, pp.1-5
- Language
- English
- Type
- Conference Paper
- Abstract
- This paper explains and demonstrates the design and fabrication process of focal length tunable micro-electro-mechanical-systems (MEMS) based deformable convex micromirror driven by electromagnetic actuation. The 4 mm x 4 mm square effective aperture size micromirror consists of a planer thin metalized polymer membrane, which curvature is controlled electromagnetically by exploiting the repulsive force property generated in two magnets interactions. The micromirror showed significantly larger focal length tunability from 316.45 cm to 5.71 cm with the maximum central surface deformation of 17.52 micrometer by varying the applied controlling current up to 700 mA. Hence, the proposed convex mirror would be a good choice to be integrated in the reflective adaptive optical systems.
- KSP Keywords
- Design and fabrication, Effective aperture, Electromagnetic actuation, Fabrication process, Focal length, Micro-electro-mechanical system(MEMS), Optical System, Polymer membranes, Surface Deformation, aperture size, convex micromirror