상세정보
학술지
Electronic Transport through Aromatic Thiol Monolayer Assembled in the Nano Via-Hole Electrode
- 저자
- 이창진, 강용구, 서경재, 신윤미, 김재호, 최성욱, 김진희, 소혜미, 이효영, 김도현, 송정군
- 발행일
- 200501
- 출처
- Japanese Journal of Applied Physics, v.44 no.1B, pp.530-534
- ISSN
- 0021-4922
- 출판사
- Japan Society of Applied Physics (JSAP), Institute of Physics (IOP)
- 초록
- Nano via-hole devices were fabricated by the e-beam patterning of holes on a SiNx insulating layer and used as electronic test platforms for the characterization of the electrical properties of molecules. Conditions of RIE were controlled to produce bowl-shaped nano size via-holes such that the diameter of the bottom opening was less than approximately 50 nm when the top diameter was 100nm. After forming a self-assembled monolayer on the bottom electrode inside the via-hole, a top metal electrode was deposited to produce an MIM type device. When dodecanethiol was used, the fabricated device showed a current density of 1.3 × 103 A/cm2 at 1.0 V, which was in the same order of magnitude as the previously reported value. When aromatic thiols were used, most devices showed diode-like behaviors with a higher current density than the dodecanethiol, and a few showed NDR-like characteristics. © 2005 The Japan Society of Applied Physics.
- KSP 제안 키워드
- Applied physics, Aromatic thiol, Bottom electrode, Bowl-shaped, Electronic Transport, Electronic test, Nano-size, Thiol monolayer, Via-hole, current density, diode-like