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학술지 Loaded-line Ferroelectric Phase Shifter Based on Mn-Doped (Ba,Sr)TiO3 Thin Films for Ka-band Systems
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저자
류한철, 이수재, 문승언
발행일
201504
출처
Journal of the Korean Physical Society, v.66 no.7, pp.1097-1100
ISSN
0374-4884
출판사
한국물리학회
DOI
https://dx.doi.org/10.3938/jkps.66.1097
협약과제
15MB1600, 미래광고 서비스를 위한 에너지절감형 환경적응 I/O (Input/Output) 플랫폼 기술 개발, 황치선
초록
This paper presents on the microwave properties of a loaded-line ferroelectric phase shifter based on (Ba, Sr)TiO3 (BST) thin films for Ka-band applications. In order to reduce the dielectric loss of the BST thin film and its enhance a dielectric tunability, we optimized the deposition of Mn-doped (Ba0.5, Sr0.5)TiO3 (Mn-BST) thin films on MgO substrates by using pulsed laser deposition (PLD). The crystallinity, microstructure and thickness of the thin films were investigated by using an X-ray diffractometer and a scanning electron microscope, respectively. We designed and fabricated a tunable ferroelectric capacitor loaded coplanar waveguide (CPW) type phase shifter to enhance the tuning and the loss characteristics of a conventional CPW ferroelectric phase shifter. The fabricated loaded-line phase shifter showed a low return loss of ?닋15 dB in the frequency band from 25 GHz to 35 GHz. The differential phase shift was 293째, and the insertion loss decreased from ?닋11.3 dB to ?닋1.4 dB with increasing dc bias voltage from 0 to 80 V at 35 GHz.
KSP 제안 키워드
3.5 GHz, BST thin film, Capacitor Loaded, Coplanar Waveguide Feeding(CPW), DC bias voltage, Differential phase shift, Ferroelectric capacitors, Loss characteristics, Microwave properties, Mn-doped, Phase Shifter