This paper presents on the microwave properties of a loaded-line ferroelectric phase shifter based on (Ba, Sr)TiO3 (BST) thin films for Ka-band applications. In order to reduce the dielectric loss of the BST thin film and its enhance a dielectric tunability, we optimized the deposition of Mn-doped (Ba0.5, Sr0.5)TiO3 (Mn-BST) thin films on MgO substrates by using pulsed laser deposition (PLD). The crystallinity, microstructure and thickness of the thin films were investigated by using an X-ray diffractometer and a scanning electron microscope, respectively. We designed and fabricated a tunable ferroelectric capacitor loaded coplanar waveguide (CPW) type phase shifter to enhance the tuning and the loss characteristics of a conventional CPW ferroelectric phase shifter. The fabricated loaded-line phase shifter showed a low return loss of ?닋15 dB in the frequency band from 25 GHz to 35 GHz. The differential phase shift was 293째, and the insertion loss decreased from ?닋11.3 dB to ?닋1.4 dB with increasing dc bias voltage from 0 to 80 V at 35 GHz.
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