상세정보
학술대회
Monolithic electronic nose system fabricated by post CMOS micromachining
- 저자
- 조성목, 고상춘, Seung-Chul Ha, 김용신, 김용준, Yoonseok Yang, 표현봉, 최창억
- 발행일
- 200511
- 출처
- SENSORS 2005, pp.420-423
- 협약과제
- 05MB3500, e-Health 구현을 위한 바이오 센서 기술 개발, 최창억
- 초록
- A monolithic electronic nose system, which has 12 independent channels, was fabricated by post CMOS micromachining process. Read-out integrated circuits were fabricated with the standard CMOS processes with design rule of 0.8 μm. And, the MEMS parts of the electronic nose were fabricated by hybrid etching, composed of bulk micromachining with TMAH (Tetramethy lammonium hydroxide) and deep dry etching, on the backside of the wafer after the CMOS processes. Resistance matching circuit, Instrumentation amplifier, multiplexer, and transducer circuits with bridge structure were included in the read-out circuitry. And, heat control circuits were also implanted in the monolithic circuit to maintain the temperature of the MEMS sensing parts as constant. Carbon black-polymer composites and Au nano-particles were used as sensor materials. The MEMS parts of the electronic nose were designed to have well-shaped structures. These structures are considered to be suitable for drop coating procedure. © 2005 IEEE.
- KSP 제안 키워드
- Au nanoparticles(Au-NPs), Bridge structure, Bulk Micromachining, CMOS Process, Control Circuit, Design rule, Drop-coating, Electronic Nose(E-Nose), Electronic nose system, Heat control, Integrated circuit