상세정보
학술지
A low-loss single-pole six-throw switch based on compact RF MEMS switches
- 발행일
- 200511
- 출처
- IEEE Transactions on Microwave Theory and Techniques, v.53 no.11, pp.3335-3344
- ISSN
- 0018-9480
- 출판사
- IEEE
- 협약과제
- 05MB4100, 초고주파 미세전자기계시스템 기술 개발(RF MEMS), 강성원
- 초록
- A low-loss single-pole six-throw (SP6T) switch using very compact metal-contact RF microelectromechanical system (MEMS) series switches is presented. The metal-contact MEMS switch has an extremely compact active area of 0.4 mm × 0.3 mm, thus permitting the formation of an SP6T MEMS switch into the RF switch with a total area of 1 mm2. The MEMS switch shows an effective spring constant of 746 N/m and an actuation time of 8.0 μs. It has an isolation loss from -64.4 to -30.6 dB and an insertion loss of 0.08-0.19 dB at 0.5-20 GHz. Furthermore, in order to evaluate RF performances of the SP6T MEMS switch, as well as those of the single-pole single-throw RF MEMS series switch, we have performed small-signal modeling based on a parameter-extraction method. Accurate agreement between the measured and modeled RF performances demonstrates the validity of the small-signal model. The SP6T switch performed well with an isolation loss from -62.4 to -39.1 dB and an insertion loss of 0.19-0.70 dB from dc to 6 GHz between the input port and each output port. © 2005 IEEE.
- KSP 제안 키워드
- 6 GHz, Active area, Extraction method, Micro-electro-mechanical system(MEMS), RF MEMS switches, RF switch, Small-signal modeling, Spring constant, insertion loss, low loss