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Conference Paper
A Novel Method to Fabricate Recessed SiGe Source/Drain using a selective Si and SiGe Epitaxial Growth without Etching Process
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- Authors
- Sang Hoon Kim, Hyun Cheol Bae, Ja Yol Lee, Sang Heung Lee
- Issue Date
- 2005-11
- Citation
- MRS Meeting 2005 (Fall), pp.1-2
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Etching process, SiGe Source, SiGe epitaxial growth, novel method