상세정보
학술지
Fabrication Process for Polymer PLC Platforms with V-Grooves for Passive Alignment
- 발행일
- 200512
- 출처
- Optics Communications, v.256 no.1-3, pp.108-113
- ISSN
- 0030-4018
- 출판사
- Elsevier
- 협약과제
- 05MB3600, 광엑세스용 광집적 모듈, 오광룡
- 초록
- A method for polymer planar lightwave circuit (PLC) devices fabricated on a substrate with V-grooves is developed for passive alignment of an optical fiber to a polymer waveguide. In order to minimize thickness nonuniformity of polymer layers caused by the V-grooves, dry film resist (DFR) is used. The V-grooves are covered with the DFR before the polymer layers are spin-coated on the substrate. The DFR prevents the polymer from being filled in the V-grooves as well as from being spin-coated nonuniformly on the substrate. This process provides a simple and cost-effective fabrication method of polymer PLCs or platforms for passive alignment. © 2005 Elsevier B.V. All rights reserved.
- KSP 제안 키워드
- Cost-effective fabrication, Fabrication method, Planar lightwave circuit(PLC), Polymer PLC, Spin-coated, V-grooves, an optical fiber, dry film resist, fabrication process, passive alignment, polymer layer