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Journal Article
Fabrication Process for Polymer PLC Platforms with V-Grooves for Passive Alignment
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- Authors
- Sun Tak Park, Jong Moo Lee, Joon Tae Ahn, Yong Soon Baek
- Issue Date
- 2005-12
- Citation
- Optics Communications, v.256, no.1-3, pp.108-113
- ISSN
- 0030-4018
- Publisher
- Elsevier
- Language
- English
- Type
- Journal Article
- Abstract
- A method for polymer planar lightwave circuit (PLC) devices fabricated on a substrate with V-grooves is developed for passive alignment of an optical fiber to a polymer waveguide. In order to minimize thickness nonuniformity of polymer layers caused by the V-grooves, dry film resist (DFR) is used. The V-grooves are covered with the DFR before the polymer layers are spin-coated on the substrate. The DFR prevents the polymer from being filled in the V-grooves as well as from being spin-coated nonuniformly on the substrate. This process provides a simple and cost-effective fabrication method of polymer PLCs or platforms for passive alignment. © 2005 Elsevier B.V. All rights reserved.
- KSP Keywords
- Cost-effective fabrication, Fabrication method, Fabrication process, Planar lightwave circuit(PLC), Polymer PLC, Spin-coated, V-grooves, an optical fiber, dry film resist, passive alignment, polymer layer