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Conference Paper
Surface Micromachined MEMS Devices by Novel Dry Release Process
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- Authors
- Won Ick Jang
- Issue Date
- 2006-02
- Citation
- 한국반도체 학술 대회 (KCS) 2006, pp.1-2
- Publisher
- 대한전기학회
- Language
- English
- Type
- Conference Paper
- Abstract
- MEMS technology is based on fabrication technology fundamental to IC fabrication and many mature engineering disciplines such as mechanics, electromagnetics, and material science. The research and development of MEMS have made remarkable progress since 1988 when an electrostatic micromotor of the size of a human hair was operated successfully. We successfully fabricated and characterized MEMS devices with no virtually process-induced stiction and no residues by novel dry release process. The characteristics of the MEMS devices for microgyroscope, micromirror array, micropump, and microfluidic platform application were evaluated by experiment.
- KSP Keywords
- Dry release, Engineering disciplines, Human hair, IC fabrication, MEMS Technology, MEMS devices, Material Science, Micro-mirror array, Release process, Surface micromachined MEMS, fabrication technology