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Conference Paper
Surface Micromachined MEMS Devices by Novel Dry Release Process
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- Authors
- Won Ick Jang
- Issue Date
- 2006-02
- Citation
- 한국반도체 학술 대회 (KCS) 2006, pp.1-2
- Language
- English
- Type
- Conference Paper
- Project Code
- 05MB3500, Development of Biosensor Technology for e-Health, Chang Auck Choi
- KSP Keywords
- Dry release, MEMS devices, Release process, Surface micromachined MEMS