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Conference Paper
Buffer Structure for Protecting Laser Damage of Plastic Substrate in Ultra Low Temperature Polycrystalline Silicon thin Film Transistor Process
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- Authors
- Yong Hae Kim, Choong Heui Chung, Sun Jin Yun, Myung Hee Lee, Dong Jin Park, Dae Won Kim, Jung Wook Lim, Yoon Ho Song, Jae Hyun Moon, Jin Ho Lee
- Issue Date
- 2006-02
- Citation
- 한국 반도체 학술 대회 (KCS) 2006, pp.1-3
- Language
- English
- Type
- Conference Paper
- Project Code
- 06MB2300, Flexible Display, Cho Kyoung Ik
- KSP Keywords
- Laser damage, Low temperature(LT), Low-temperature polycrystalline Silicon(LTPS), Plastic substrate, Polycrystalline silicon(poly-Si), Polycrystalline silicon thin film, Thin-Film Transistor(TFT), Ultra Low, buffer structure, thin film(TF)