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학술대회
Buffer Structure for Protecting Laser Damage of Plastic Substrate in Ultra Low Temperature Polycrystalline Silicon thin Film Transistor Process
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- 발행일
- 200602
- 출처
- 한국 반도체 학술 대회 (KCS) 2006, pp.1-3
- 협약과제
- 06MB2300, Flexible 디스플레이, 조경익
- KSP 제안 키워드
- Laser damage, Low temperature(LT), Low-temperature polycrystalline Silicon(LTPS), Plastic substrate, Polycrystalline silicon(poly-Si), Polycrystalline silicon thin film, Thin-Film Transistor(TFT), Ultra Low, buffer structure, thin film(TF)