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Conference Paper Plasma-Enhanced Atomic Layer Deposition 기술을 이용한 ZrOB 2B 박막 증착 공정에서 증착 온도와 Plasma Pulse Width가 박막 특성에 미치는 효과

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Authors: 윤선진, 임정욱, 노종수, 이진호

Issue Date: 2006-02

Citation: 한국반도체 학술 대회 (KCS) 2006, pp.1-2

Language: Korean

Type: Conference Paper

Project Code: 05MB3300, Flexible Display, Kang Kwang-Yong

KSP Keywords: Plasma-enhanced atomic layer deposition

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