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Conference Paper
Three-Dimensional Selective Oxidation Fin Channel MOSFET and Its Electrical Characteristics
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- Authors
- Young Kyun Cho, Tae Moon Roh, Jong Dae Kim
- Issue Date
- 2006-02
- Citation
- 한국 반도체 학술 대회 (KCS) 2006, pp.1-2
- Language
- English
- Type
- Conference Paper
- Project Code
- 06MB3100, Components/Module technology for Ubiquitous Terminals, Kim Jongdae
- KSP Keywords
- Selective oxidation, Three dimensional(3D), electrical characteristics