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학술지 Simultaneous Optical/Electrical Interconnection of Polymer Planar-Lightwave-Circuit Chip based on Polymer MOEMS and Replication Technology
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저자
김진태, 최춘기
발행일
200602
출처
Sensors and Actuators A : Physical, v.126 no.2, pp.425-429
ISSN
0924-4247
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.sna.2005.10.035
협약과제
05SB1300, 나노 패턴 공정 및 나노 광소자 개발, 최춘기
초록
For simultaneous optical/electrical interconnection of a polymeric planar-lightwave-circuit (PLC) chip, a polymer micro-opto-electro-mechanical system (MOEMS)-based passive alignment method was designed and realized in thermosetting polymer using a UV imprinting technique. To reduce the steps for fabricating alignment structures, waveguide cores and micro-pedestals were formed at the same time with only one step of imprinting. By inserting the electrode-patterned micro-pedestals on the polymer PLC chip into the alignment pits of the silicon optical bench, optical/electrical interconnections were accomplished simultaneously and automatically. An assembled polymeric optical device shows a coupling loss of about 1.7 dB per coupling face and a good electrical interconnection at a wavelength of 1.5 μm. © 2005 Elsevier B.V. All rights reserved.
KSP 제안 키워드
Alignment method, Coupling loss, Microoptoelectromechanical system(MOEMS), One-step, Optical devices, Polymer PLC, Silicon optical bench(SIOB), UV imprinting, alignment structures, electrical interconnections, imprinting technique