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학술지 Ultrafast Laser Ablation of Indium Tin Oxide Thin Films for Organic Light-Emitting Diode Application
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저자
박미라, 전병혁, 김현선, 정세채, 김동호, 이정익, 추혜용, 김형래
발행일
200602
출처
Optics and Lasers in Engineering, v.44 no.2, pp.138-146
ISSN
0143-8166
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.optlaseng.2005.03.009
협약과제
06MB2300, Flexible 디스플레이, 조경익
초록
Ultrafast laser ablation of ITO thin film coated on the glass has been investigated as a function of laser fluence as well as the number of laser pulses. The ablation threshold of ITO thin film was found to be 0.07 J/cm 2 that is much lower than that of glass substrate (about 1.2-1.6 J/cm2), which leads to a selective ablation of ITO film without damage on glass substrate. The changes in the electrical resistance and morphology of ablated trench of ITO electrode were found to be strongly dependent on the processing conditions. We present the performance of organic light-emitting diodes (OLED) fabricated with ITO electrode patterned by ultrafast laser ablation. © 2005 Elsevier Ltd. All rights reserved.
키워드
ITO, OLED, Patterning, Ultrafast laser
KSP 제안 키워드
Electrical Resistance, Glass substrate, ITO electrode, ITO film, ITO thin film, Indium tin oxide thin films, Laser fluence, Laser pulse, Organic light-emitting diodes(OLEDS), Processing conditions, Selective ablation