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학술대회
Plasma-Free Defect Passivation of Ultra Low Temperature Poly-Si Thin Film Transistors
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- 발행일
- 200602
- 출처
- 한국반도체 학술 대회 (KCS) 2006, pp.1-2
- 협약과제
- 06MB2300, Flexible 디스플레이, 조경익
- KSP 제안 키워드
- Defect passivation, Low temperature(LT), Low temperature poly-Si, Poly-Si thin film, Polycrystalline silicon(poly-Si), Thin-Film Transistor(TFT), Ultra Low, thin film(TF)