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Conference Paper
Plasma-Free Defect Passivation of Ultra Low Temperature Poly-Si Thin Film Transistors
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- Authors
- Choong Heui Chung, Yong Hae Kim, Jae Hyun Moon, Myung Hee Lee, Jung Wook Lim, Sun Jin Yun, Dong Jin Park, Jin Ho Lee
- Issue Date
- 2006-02
- Citation
- 한국반도체 학술 대회 (KCS) 2006, pp.1-2
- Publisher
- 대한전기학회
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Defect passivation, Low temperature(LT), Low temperature poly-Si, Poly-Si thin film, Polycrystalline silicon(poly-Si), Thin-Film Transistor(TFT), Ultra Low, thin film(TF)