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Conference Paper Crystallization of Poly-Si Film Using Triple-Layered Buffer Structure for Poly-Si TFT on Plastic Substrate
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Authors
이명희, 김용해, 정중희, 문제현, 윤선진, 이진호, 김도진
Issue Date
2006-02
Citation
한국 반도체 학술 대회 (KCS) 2006, pp.1-2
Language
Korean
Type
Conference Paper
Project Code
06MB2300, Flexible Display, Cho Kyoung Ik
KSP Keywords
Plastic substrate, Poly-Si TFT, Poly-Si film, Polycrystalline silicon(poly-Si), buffer structure