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Conference Paper Crystallization of Poly-Si Film Using Triple-Layered Buffer Structure for Poly-Si TFT on Plastic Substrate

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Authors: 이명희, 김용해, 정중희, 문제현, 윤선진, 이진호, 김도진

Issue Date: 2006-02

Citation: 한국 반도체 학술 대회 (KCS) 2006, pp.1-2

Language: Korean

Type: Conference Paper

Project Code: 06MB2300, Flexible Display, Cho Kyoung Ik

KSP Keywords: Plastic substrate, Poly-Si TFT, Poly-Si film, Polycrystalline silicon(poly-Si), buffer structure

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