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Conference Paper Low-Voltage Pentacene Transistors and Inverters with Plasma-Enhanced Atomic Layer Deposited Gate Dielectrics
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Authors
Jae Bon Koo, Jung Wook Lim, Seong Hyun Kim, Sun Jin Yun, Chan Hoe Ku, Sang Chul Lim, Jung Hun Lee, Tae Hyoung Zyung
Issue Date
2006-04
Citation
MRS Meeting 2006 (Spring), pp.1-14
Language
English
Type
Conference Paper
Project Code
06ZB1300, Device and materials for plastic transistors, Kim Seong Hyun
KSP Keywords
Plasma-enhanced, atomic layer, gate dielectric, low voltage, pentacene transistors