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Conference Paper
Low-Voltage Pentacene Transistors and Inverters with Plasma-Enhanced Atomic Layer Deposited Gate Dielectrics
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- Authors
- Jae Bon Koo, Jung Wook Lim, Seong Hyun Kim, Sun Jin Yun, Chan Hoe Ku, Sang Chul Lim, Jung Hun Lee, Tae Hyoung Zyung
- Issue Date
- 2006-04
- Citation
- MRS Meeting 2006 (Spring), pp.1-14
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Low voltage, Plasma-enhanced, atomic layer, gate dielectric, pentacene transistors