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학술대회
Plasma-Enhanced Atomic Layer Deposition of ZrO2 film and the Performance of Pentacene thin film Transistor with ZrO2 Gate Dielectric Layer
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- 발행일
- 200607
- 출처
- International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1
- KSP 제안 키워드
- Pentacene thin-film transistors, Plasma-enhanced atomic layer deposition, Thin-Film Transistor(TFT), dielectric layer, gate dielectric, thin film(TF)