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Conference Paper
Plasma-Enhanced Atomic Layer Deposition of ZrO2 film and the Performance of Pentacene thin film Transistor with ZrO2 Gate Dielectric Layer
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- Authors
- Sun Jin Yun, Jae Bon Koo, Jung Wook Lim, Sung Hyun Kim
- Issue Date
- 2006-07
- Citation
- International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Pentacene thin-film transistors, Plasma-enhanced atomic layer deposition, Thin-Film Transistor(TFT), dielectric layer, gate dielectric, thin film(TF)