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Conference Paper Plasma-Enhanced Atomic Layer Deposition of ZrO2 film and the Performance of Pentacene thin film Transistor with ZrO2 Gate Dielectric Layer
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Authors
Sun Jin Yun, Jae Bon Koo, Jung Wook Lim, Sung Hyun Kim
Issue Date
2006-07
Citation
International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1
Language
English
Type
Conference Paper
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