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Conference Paper Defect Passivation of Ultralow Temperature Poly-Si Thin-Film Transistors
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Authors
Choong Heui Chung, Yong Hae Kim, Jae Hyun Moon, Myung Hee Lee, Jung Wook Lim, Sun Jin Yun, Dong Jin Park, Jin Ho Lee
Issue Date
2006-04
Citation
MRS Meeting 2006 (Spring), pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Defect passivation, Polycrystalline silicon(poly-Si), Thin-Film Transistor(TFT), thin film(TF)