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Conference Paper Fabrication of Dummy Structure using Inorganic Resist for Dual Gate-Controlled Single-Electron Transistor

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Authors: I.B. Baek, C.G. Ahn, H.Y. You, K.J. Im, J.H. Yang, W.J. Cho, S.J. Lee

Issue Date: 2006-05

Citation: International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2006, pp.1-2

Language: English

Type: Conference Paper

Project Code: 06MB3200, Ubiquitous Health Monitoring Module and System Development, Park Seon Hee

KSP Keywords: Gate-controlled, dual gate(DG), inorganic resist, single-electron transistor

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