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Conference Paper Switching Mechanism of TiO2 thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition

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Authors: Min Ki Ryu, Jung Wook Lim, Sung Yool Choi

Issue Date: 2006-05

Citation: MRS Meeting 2006 (Spring), pp.1-1

Language: English

Type: Conference Paper

KSP Keywords: Plasma-enhanced atomic layer deposition, Switching mechanism, TiO2 thin films, thin film(TF)

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