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Conference Paper Switching Mechanism of TiO2 thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
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Authors
Min Ki Ryu, Jung Wook Lim, Sung Yool Choi
Issue Date
2006-05
Citation
MRS Meeting 2006 (Spring), pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Plasma-enhanced atomic layer deposition, Switching mechanism, TiO2 thin films, thin film(TF)