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Conference Paper
Switching Mechanism of TiO2 thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
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- Authors
- Min Ki Ryu, Jung Wook Lim, Sung Yool Choi
- Issue Date
- 2006-05
- Citation
- MRS Meeting 2006 (Spring), pp.1-1
- Language
- English
- Type
- Conference Paper
- Project Code
- 05IF1100, Development of Organic Materials for Gigabit Organic Memory, Sung-Yool Choi
- KSP Keywords
- Plasma-enhanced atomic layer deposition, Switching mechanism, TiO2 thin films, thin film(TF)