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학술대회 Transparent ZnO Thin Film Transistor Array for the Application of Transparent AM-OLED Display
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저자
박상희, 황치선, 이정익, 정승묵, 양용석, 도이미, 추혜용
발행일
200606
출처
International Symposium, Seminar and Exhibition (SID) 2006, pp.25-28
DOI
https://dx.doi.org/10.1889/1.2433472
협약과제
06MB2300, Flexible 디스플레이, 조경익
초록
We have fabricated 2.15 inch AM-OLED panel composed of 176 × 144 (106 dpi) transparent pixels driven by ZnO-TFT. Transparent ZnO thin film deposited by means of atomic layer deposition at 100°C was used for the active channel. The ZnO TFT had a mobility of 1.13cm2/V.s, a threshold voltage of 0.8V, and an on/off ratio of 106. The fabrication of the ZnO TFT array for AM-OLED display has been carried out with four-mask process. And the integration of the ZnO TFT array and the transparent OLED consisted of a transparent anode and cathode and organic layers led to really transparent display.
KSP 제안 키워드
AM-OLED, Active channel, Anode and cathode, Atomic Layer Deposition, OLED display, Organic layers, TFT array, Thin-Film Transistor(TFT), Transparent anode, Transparent display, ZnO thin films