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4.3: Transparent ZnO Thin Film Transistor Array for the Application of Transparent AM-OLED Display
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- Authors
- Sang Hee Ko Park, Chi Sun Hwang, Jeong Ik Lee, Sung Mook Chung, Yong Suk Yang, Lee Mi Do, Hye Yong Chu
- Issue Date
- 2006-06
- Citation
- International Symposium, Seminar and Exhibition (SID) 2006, pp.25-28
- Language
- English
- Type
- Conference Paper
- Abstract
- We have fabricated 2.15 inch AM-OLED panel composed of 176 × 144 (106 dpi) transparent pixels driven by ZnO-TFT. Transparent ZnO thin film deposited by means of atomic layer deposition at 100°C was used for the active channel. The ZnO TFT had a mobility of 1.13cm2/V.s, a threshold voltage of 0.8V, and an on/off ratio of 106. The fabrication of the ZnO TFT array for AM-OLED display has been carried out with four-mask process. And the integration of the ZnO TFT array and the transparent OLED consisted of a transparent anode and cathode and organic layers led to really transparent display.
- KSP Keywords
- AM-OLED, Active channel, Anode and cathode, Atomic Layer Deposition, OLED display, ON/OFF ratio, Organic layer, TFT array, Thin-Film Transistor(TFT), Transparent anode, ZnO thin films