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Self-Aligned Thin Film Transistor Fabrication with an Ultra Low Temperature Polycrystalline Silicon Process on a Benzocyclobutene Planarized Stainless Steel Foil Substrate
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- 발행일
- 200604
- 출처
- Materials Research Society (MRS) Meeting 2006 (Spring), pp.1-6
- 협약과제
- 06MB2300, Flexible 디스플레이, 조경익
- KSP 제안 키워드
- Low temperature(LT), Low-temperature polycrystalline Silicon(LTPS), Polycrystalline silicon(poly-Si), Silicon process, Stainless steel(SUS316), Stainless steel foil substrate, Thin-Film Transistor(TFT), Ultra Low, self-Aligned, thin film(TF)