상세정보
학술지
CCQM Pilot Study P-140: Quantitative Surface Analysis of Multi-Element Alloy Films
- 저자
- 김경중, 장종식, 김안순, 서정기, 정용덕, Vasile-Dan HODOROABA, Thomas WIRTH, Wolfgang UNGER, 강희재, Oleg POPOV, Inna POPOV, Ilya KUSELMAN, 이연희, David E. SYKES, Meiling WANG, Hai WANG, Toshiya OGIWARA, Mitsuaki NISHIO, Shigeo TANUMA, David SIMONS, Christopher SZAKAL, William OSBORN, Shinya TERAUCHI, Mika ITO, Akira KUROKAWA, Toshiyuki FUJIMOTO, Werner JORDAAN, Chil Seong JEONG, Rasmus HAVELUND, Steve SPENCER, Alex SHARD, Cornelia STREECK, Burkhard BECKHOFF, Axel EICKE, Ralf TERBORG
- 발행일
- 201512
- 출처
- Metrologia, v.52 no.Technical Suppl., pp.1-28
- ISSN
- 0026-1394
- 출판사
- Institute of Physics (IOP)
- KSP 제안 키워드
- Alloy films, Multi-element alloy, Pilot Study, Quantitative surface analysis