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Conference Paper Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide using Tetrakis(Ethylmethylamino) Vanadium and O2 as Precursors
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Authors
Sun Jin Yun, Jung Wook Lim, Byung Gyu Chae, Hyun Tak Kim
Issue Date
2006-07
Citation
International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Plasma-enhanced atomic layer deposition, Vanadium oxide
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