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Conference Paper Plasma Enhanced Atomic Layer Deposition of Vanadium Oxide using Tetrakis(Ethylmethylamino) Vanadium and O2 as Precursors

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Authors: Sun Jin Yun, Jung Wook Lim, Byung Gyu Chae, Hyun Tak Kim

Issue Date: 2006-07

Citation: International Conference on Atomic Layer Deposition Workshop (ALD) 2006, pp.1-1

Language: English

Type: Conference Paper

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