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Conference Paper Transparent ZnO Transistor Array by Means of Plasma Enhanced Atomic Layer Deposition
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Authors
Sang Hee Park, Chi Sun Hwang, Ho Sang Kwack, Jung Ik Lee, Hye Yong Chu
Issue Date
2006-08
Citation
International Meeting on Information Display 2006, pp.601-604
Language
English
Type
Conference Paper
KSP Keywords
Plasma-enhanced atomic layer deposition, transistor array
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