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학술지 Abnormal Optical Changes with the Formation of Pt Nanoclusters
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저자
김상협, 김혜진, 김용성, 김혜진
발행일
200608
출처
Current Applied Physics, v.6 no.6, pp.1036-1039
ISSN
1567-1739
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.cap.2005.07.014
협약과제
05MB4900, 차세대 고성능 광전자소자 및 스마트 생화학 센서 구현을 위한 IT-BT-NT 융합 핵심기술 개발, 맹성렬
초록
We have investigated the effect of the annealing time on the structural and abnormal optical changes of amorphous platinum oxide thin films on quartz glass substrate by dc magnetron sputtering by using a pure platinum target. With increasing the annealing time, the decomposition phenomenon of a-PtOx and the formation of Pt nanoclusters were also observed. X-ray diffraction and Raman scattering measurements confirmed that the change derives from the formation of Pt nanoclusters due to the thermal decomposition. A transmittance measurement of a-PtOx thin films annealed at 600 °C for 0-4 min demonstrated abnormal optical changes. © 2005 Elsevier B.V. All rights reserved.
KSP 제안 키워드
Annealing time, Oxide thin films, Platinum oxide, Pt nanoclusters, Quartz glass substrate, Raman scattering(SERS), Scattering measurements, Thermal Decomposition, Transmittance measurement, dc Magnetron sputtering, thin film(TF)