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학술지 Fabrication of Polymer Photonic Crystal Slabs using Nanoimprint Lithography
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저자
최춘기, 기철식, H. Schift
발행일
200608
출처
Current Applied Physics, v.6 no.SUPPL. 1, pp.e8-e11
ISSN
1567-1739
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.cap.2006.01.003
협약과제
06SB1200, 나노 패턴 공정 및 나노 광소자 개발, 최춘기
초록
We applied the thermal nanoimprint lithography to replicate two-dimensional photonic crystal slabs having line defected waveguides with a triangular array of air-holes on polymers. The photonic band gap structures, calculated by the plane wave expansion technique, show that 2-D polystyrene photonic crystal slabs have a complete small photonic band gaps between 0.49 and 0.51 for the TE-like modes. The fabrication process of 2-D polystyrene photonic crystal slabs is reported. The dimensions of the fabricated line defected waveguide slab structures with a triangular array of air-holes correspond well to those of the proposed structures. The nanoimprinted polymer photonic crystal slabs will be attractive candidates for the implementations of ultra-compact low cost photonic crystal integrated circuits. © 2006 Elsevier B.V. All rights reserved.
KSP 제안 키워드
Integrated circuit, Low-cost, Photonic band gap structures, Photonic bandgap(PBG), Photonic crystal slab, Polymer photonic crystal, Triangular array, Two-dimensional photonic crystals(2D PhCs), Waveguide slab, fabrication process, photonic crystal(PC)