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Conference Paper Formation of Ni-Disilicide Nanowire Using Ni Implantation Coupled with Laser Annealing
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Authors
Chel Jong Choi, Moon Gyu Jang, Yark Yeon Kim, Myung Sim Jeon, Byoung Chul Park, Seong Jae Lee, Young Woo Ok, Tae Yeon Seong, King Ning Tu
Issue Date
2006-09
Citation
International Microscopy Congress, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Coupled with, Laser annealing, Ni implantation