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Conference Paper
Formation of Ni-Disilicide Nanowire Using Ni Implantation Coupled with Laser Annealing
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- Authors
- Chel Jong Choi, Moon Gyu Jang, Yark Yeon Kim, Myung Sim Jeon, Byoung Chul Park, Seong Jae Lee, Young Woo Ok, Tae Yeon Seong, King Ning Tu
- Issue Date
- 2006-09
- Citation
- International Microscopy Congress, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Coupled with, Laser annealing, Ni implantation