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학술대회 Implant Isolation Characteristics for SoC Application
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저자
김성일, 이철욱, 백용순, 문종태
발행일
200609
출처
European Microwave Integrated Circuits Conference (EuMIC) 2006, pp.403-405
DOI
https://dx.doi.org/10.1109/EMICC.2006.282667
협약과제
06MB3500, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
초록
The isolation issue has manifested itself for system-on-chip (SoC) applications in future because it possesses a key technology for mixed-mode circuits. We have measured and analyzed implant isolation characteristics for high degree of isolation. We derived an equivalent circuit from the measurement and analysis of various implant conditions, which can be used for SoC design and fabrication fields. © 2006 EuMA.
KSP 제안 키워드
Degree of isolation, Design and fabrication, Equivalent Circuit, High degree, Key technology, Measurement and analysis, SoC Design, SoC application, System-On-Chip(SoC), mixed-mode